The instrument model：Nova NanoSEM450
The Nova NanoSEM450 is a Schottky Field Emission Scanning Electron Microscope (FESEM) that combines high- and low-voltage ultra-high resolution capabilities with the world‘s only low-vacuum, high-resolution imaging solution. The instrument features a two-mode final lens, beam deceleration and environmental technologies, bringing unprecedented versatile capabilities to researchers and students.
The beam deceleration mode makes it possible to achieve superb contrast and surface sensitivity. Superior contrast and compositional information is obtained using the low-voltage BSE detector. On the other hand, the immersion lens mode combined with low-vacuum allows for unique, ultra-high resolution, characterization in an environment that suppresses charge build-up on non-conductors (materials, components of nano-devices etc). Clean and contrasted imaging is also enabled by low vacuum for those samples that suffer from residual surface contamination.
● NSFEG with ultra-high brightness Schottky field emitter
● High voltage 200 V to 30 kV, continuously adjustable
● Landing energy 50 V to 30 kV, continuously adjustable
● Beam Current Up to 200 nA
● ResolutionHigh-vacuum imaging, optimum working distance
● - 1.0 nm at 15 kV (TLD-SE)
● - 1.4 nm at 1 kV (TLD–SE without beam deceleration; requires a Plasma Cleaner)
● - 3.5 nm at 100 V (DBS).
High vacuum analysis, analytical working distance
● - 3.0 nm at 15 kV and 5 nA (TLD-SE)
Low-vacuum imaging, optimum working distance
● - 1.5 nm at 10 kV (Helix detector)
● - 1.8 nm at 3 kV (Helix detector)
● In-lens SE/BSE detector (TLD)
● Everhardt-Thornley SED
● Low vacuum SED (LVD)
● Retractable High sensitivity low kV Directional Backscattered Detector (DBS),
● TV-rate low vacuum solid-state BSED (GAD)
● UHR low vacuum SED (Helix detector)
An integrated plasma cleaner helps to ensure that the specimen surface stays clean. The removal of hydrocarbon contaminants is of particular importance when operating at low kV for true surface imaging
● Analytical System
Integrated Energy Dispersive X-ray Microanalysis (EDS) and Electron Backscattered Diffraction system (EBSD) from Oxford Instruments allowing to perform qualitative and quantitative chemical analysis, image capture, and X-ray spectral mapping and line scanning complemented by structural and crystallographic information including crystal orientation and misorientation, accurate phase identification and mapping.
● Hardware includes:
● - X-Max50 SDD detector with PentaFET Precision - 50mm2active area.
● Resolution guaranteed on Mn Ka - 127eV at 20,000 cps.
● Includes SATW window for detection of elements from Beryllium
● - EBSD NORDLYS Nano CCD camera detector
● Advanced AztecSynergy package for collecting and processing EDS and EBSD data simultaneously.